Inventor
BISWAS ROSHNI
US5 patents
Patents
5 patentsUS11972194B2Apr 30, 2024
Method for determining patterning device pattern based on manufacturability
ASML NETHERLANDS BV2 citations71
US11789371B2Oct 17, 2023
Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device
ASML NETHERLANDS BV0 citations61
US11580289B2Feb 14, 2023
Method for determining patterning device pattern based on manufacturability
ASML NETHERLANDS BV1 citations61
US11409203B2Aug 9, 2022
Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device
ASML NETHERLANDS BV0 citations61
US11016395B2May 25, 2021
Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device
ASML NETHERLANDS BV0 citations61