Inventor

BAN COZY

JP19 patents

⚠️ This page may combine multiple inventors who share the name “BAN COZY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BAN COZY

MITSUBISHI ELECTRIC CORP

Semiconductor nitride film etching system

Device for and method of producing hyperfine frozen particles

Semiconductor workpiece cleaning method and apparatus

Aeration apparatus for producing ultrapure water

Semiconductor workpiece cleaning method and apparatus

Drying apparatus and method using IPA of a semiconductor wafer

Apparatus for treating the surface of a semiconductor substrate

Apparatus and method for producing ultrapure water and method of controlling the apparatus

High-temperature ultrapure water production apparatus and liquid medicine preparation apparatus equipped with the production apparatus

Method for treating semiconductor substrates

Semiconductor manufacturing non-processing apparatuses with storage equipment

Apparatus for producing pure water

Method for producing pure water

Apparatus for manufacturing ultrapure water

Wet-process apparatus

Method and apparatus for removing contaminants from the surface of a semiconductor wafer

Method of forming tungsten silicide film, method of fabricating semiconductor devices and semiconductor manufactured thereby

RYODEN SEMICONDUCTOR SYST ENG

Drying apparatus for processing surface of substrate

Drying apparatus and method