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Inventor
SUWA HIDENORI
JP
6 patents
⚠️ This page may combine multiple inventors who share the name “SUWA HIDENORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULVAC CORP
2 patents
US6533630B1
Mar 18, 2003
Vacuum device and method of manufacturing plasma display device
ULVAC CORP
24 citations
88
US5147168A
Sep 15, 1992
Loading and unloading airlock apparatus for a vacuum treatment chamber
ULVAC CORP
18 citations
72
NIHON SINKU GIJUTSU KABUSIKI
1 patent
US5755887A
May 26, 1998
Components of apparatus for film making and method for manufacturing the same
NIHON SINKU GIJUTSU KABUSIKI
26 citations
85
NIHON SINKU GIJUTSU KABUSIKI K
1 patent
US5628839A
May 13, 1997
Components of apparatus for film making and method for manufacturing the same
NIHON SINKU GIJUTSU KABUSIKI K
15 citations
77
NIHON SHINKU GIJUTSU KABUSHI K
1 patent
US5106470A
Apr 21, 1992
Method and device for controlling an electromagnet for a magnetron sputtering source
NIHON SHINKU GIJUTSU KABUSHI K
16 citations
65
NAMEKAWA TAKUMI
1 patent
US8205952B2
Jun 26, 2012
Spacer placing method
NAMEKAWA TAKUMI
0 citations
43