Inventor

WILLIAMS MEREDITH J

US6 patents

⚠️ This page may combine multiple inventors who share the name “WILLIAMS MEREDITH J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

5 patents

US5960555AOct 5, 1999

Method and apparatus for purging the back side of a substrate during chemical vapor processing

APPLIED MATERIALS INC92 citations97

US6048403AApr 11, 2000

MINNESOTA MINING & MFG

1 patent

US5635718AJun 3, 1997

Multi-module radiation detecting device and fabrication method

MINNESOTA MINING & MFG124 citations96

WILLIAMS MEREDITH J

APPLIED MATERIALS INC

Method and apparatus for purging the back side of a substrate during chemical vapor processing

Multi-ledge substrate support for a thermal processing chamber

Co-rotating edge ring extension for use in a semiconductor processing chamber

Method and apparatus for achieving temperature uniformity of a substrate

Reflector cover for a semiconductor processing chamber

MINNESOTA MINING & MFG

Multi-module radiation detecting device and fabrication method