Inventor
MAZE III JOHN ALBERT
US8 patents
⚠️ This page may combine multiple inventors who share the name “MAZE III JOHN ALBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUCENT TECHNOLOGIES INC
5 patentsUS6368955B1Apr 9, 2002
Method of polishing semiconductor structures using a two-step chemical mechanical planarization with slurry particles having different particle bulk densities
LUCENT TECHNOLOGIES INC57 citations95
US6150271ANov 21, 2000
Differential temperature control in chemical mechanical polishing processes
LUCENT TECHNOLOGIES INC34 citations91
US5967885AOct 19, 1999
Method of manufacturing an integrated circuit using chemical mechanical polishing
LUCENT TECHNOLOGIES INC20 citations91
US5951382ASep 14, 1999
Chemical mechanical polishing carrier fixture and system
LUCENT TECHNOLOGIES INC3 citations61
US6080671AJun 27, 2000
Process of chemical-mechanical polishing and manufacturing an integrated circuit
LUCENT TECHNOLOGIES INC4 citations57