Inventor
FIELD ALAN H
US8 patents
⚠️ This page may combine multiple inventors who share the name “FIELD ALAN H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZYGO CORP
3 patentsUS4883357ANov 28, 1989
Dual high stability interferometer
ZYGO CORP56 citations92
US7616322B2Nov 10, 2009
Cyclic error compensation in interferometry systems
ZYGO CORP9 citations83
US5249030ASep 28, 1993
Method and apparatus for determining the position of a moving body and the time of the position measurement
ZYGO CORP15 citations69
SEMITEST INC
3 patentsUS6163163ADec 19, 2000
Semiconductor material characterizing method and apparatus
SEMITEST INC23 citations90
US6097205AAug 1, 2000
Method and apparatus for characterizing a specimen of semiconductor material
SEMITEST INC51 citations90
US6034535AMar 7, 2000
Method utilizing a modulated light beam for determining characteristics such as the doping concentration profile of a specimen of semiconductor material
SEMITEST INC18 citations81