Inventor
SHIBAZAKI YUICHI
JP231 patents
⚠️ This page may combine multiple inventors who share the name “SHIBAZAKI YUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
39 patentsUS7589822B2Sep 15, 2009
Stage drive method and stage unit, exposure apparatus, and device manufacturing method
NIKON CORP72 citations99
US7489389B2Feb 10, 2009
Stage device with frame-shaped member movable in at least three degrees of freedom within a two-dimensional plane
NIKON CORP566 citations99
US8045136B2Oct 25, 2011
Stage drive method and stage unit, exposure apparatus, and device manufacturing method
NIKON CORP50 citations98
US8054472B2Nov 8, 2011
Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method
NIKON CORP30 citations96
US8013982B2Sep 6, 2011
Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method
NIKON CORP34 citations96
US7839485B2Nov 23, 2010
Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method
NIKON CORP43 citations96
US9971246B2May 15, 2018
Exposure method, exposure apparatus, and device manufacturing method
NIKON CORP18 citations94
US9983486B2May 29, 2018
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
NIKON CORP14 citations93
US9971253B2May 15, 2018
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method
NIKON CORP9 citations93
US9429854B2Aug 30, 2016
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method
NIKON CORP8 citations93
US9377698B2Jun 28, 2016
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method
NIKON CORP8 citations93
US8027021B2Sep 27, 2011
Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
NIKON CORP11 citations93
US7999918B2Aug 16, 2011
Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method
NIKON CORP17 citations93
US7619715B2Nov 17, 2009
Coupling apparatus, exposure apparatus, and device fabricating method
NIKON CORP19 citations93
US7154684B2Dec 26, 2006
Optical element holding apparatus
NIKON CORP37 citations93
US6930842B2Aug 16, 2005
Optical element holding device for exposure apparatus
NIKON CORP48 citations93
US10852639B2Dec 1, 2020
Exposure apparatus and exposure method, and device manufacturing method
NIKON CORP3 citations84
US10775708B2Sep 15, 2020
Substrate processing system and substrate processing method, and device manufacturing method
NIKON CORP9 citations84
US10684562B2Jun 16, 2020
Measurement device, lithography system and exposure apparatus, and device manufacturing method
NIKON CORP7 citations84
US10409166B2Sep 10, 2019
Exposure apparatus and exposure method, and device manufacturing method
NIKON CORP5 citations84
US10338482B2Jul 2, 2019
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
NIKON CORP10 citations84
US10268126B2Apr 23, 2019
Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method
NIKON CORP6 citations84
US10197924B2Feb 5, 2019
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method
NIKON CORP3 citations84
US10151979B2Dec 11, 2018
Exposure method, exposure apparatus, and device manufacturing method
NIKON CORP5 citations84
US10073345B2Sep 11, 2018
Exposure method, exposure apparatus, and device manufacturing method
NIKON CORP7 citations84
US9958792B2May 1, 2018
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
NIKON CORP9 citations84
US9921490B2Mar 20, 2018
Substrate holding device, exposure apparatus, and device manufacturing method
NIKON CORP6 citations84
US9678433B2Jun 13, 2017
Exposure apparatus and exposure method, and device manufacturing method
NIKON CORP6 citations84
US9588443B2Mar 7, 2017
Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing method
NIKON CORP10 citations84
US9507267B2Nov 29, 2016
Exposure apparatus, exposure method, and device manufacturing method
NIKON CORP3 citations84
US9477155B2Oct 25, 2016
Exposure method, exposure apparatus, and device manufacturing method
NIKON CORP7 citations84
US9423705B2Aug 23, 2016
Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method
NIKON CORP6 citations84
US9389517B2Jul 12, 2016
Exposure apparatus, exposure method, and device manufacturing method
NIKON CORP3 citations84
US9372414B2Jun 21, 2016
Exposure method and device manufacturing method measuring position of substrate stage using at least three of four encoder heads
NIKON CORP6 citations84
US9360772B2Jun 7, 2016
Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method
NIKON CORP5 citations84
US9329060B2May 3, 2016
Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
NIKON CORP3 citations84
US9323160B2Apr 26, 2016
Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium
NIKON CORP10 citations84
US9291917B2Mar 22, 2016
Exposure apparatus, exposure method, and device manufacturing method
NIKON CORP3 citations84
US9244367B2Jan 26, 2016
Exposure apparatus, exposure method, and device manufacturing method
NIKON CORP3 citations84
SHIBAZAKI YUICHI
8 patentsUS8134688B2Mar 13, 2012
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method
SHIBAZAKI YUICHI45 citations98
US8675171B2Mar 18, 2014
Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making method
SHIBAZAKI YUICHI32 citations94
US8553203B2Oct 8, 2013
Stage drive method and stage unit, exposure apparatus, and device manufacturing method
SHIBAZAKI YUICHI7 citations93
US8514395B2Aug 20, 2013
Exposure method, exposure apparatus, and device manufacturing method
SHIBAZAKI YUICHI12 citations93
US8493547B2Jul 23, 2013
Exposure apparatus, exposure method, and device manufacturing method
SHIBAZAKI YUICHI8 citations93
US8203697B2Jun 19, 2012
Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method
SHIBAZAKI YUICHI29 citations93
US9423702B2Aug 23, 2016
Exposure apparatus, exposure method, and device manufacturing method measuring position of substrate stage by switching between encoder and interferometer
SHIBAZAKI YUICHI3 citations84
US9423703B2Aug 23, 2016
Exposure apparatus and device manufacturing method measuring position of substrate stage using at least three of four encoder heads
SHIBAZAKI YUICHI7 citations84
NIPPON KOGAKU KK
3 patentsUS9891531B2Feb 13, 2018
Exposure apparatus and exposure method, and device manufacturing method
NIPPON KOGAKU KK15 citations93
US9857701B2Jan 2, 2018
Exposure apparatus, exposure method, and device manufacturing method
NIPPON KOGAKU KK13 citations93
US9874822B2Jan 23, 2018
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
NIPPON KOGAKU KK9 citations84
Showing the top 50 of 231 patents by PatentIndex Score.