Inventor
UMEMURA EIICHI
JP8 patents
Patents
8 patentsUS7081758B2Jul 25, 2006
Inspection pattern, inspection method, and inspection system for detection of latent defect of multi-layer wiring structure
OKI ELECTRIC IND CO LTD13 citations80
US6884637B2Apr 26, 2005
Inspection pattern, inspection method, and inspection system for detection of latent defect of multi-layer wiring structure
OKI ELECTRIC IND CO LTD12 citations80
US6677236B2Jan 13, 2004
Semiconductor device fabrication method for interconnects that suppresses loss of interconnect metal
OKI ELECTRIC IND CO LTD8 citations71
US6346749B1Feb 12, 2002
Semiconductor device
OKI ELECTRIC IND CO LTD12 citations71
US7215029B1May 8, 2007
Multilayer interconnection structure of a semiconductor
OKI ELECTRIC IND CO LTD2 citations60
US6690092B2Feb 10, 2004
Multilayer interconnection structure of a semiconductor device
OKI ELECTRIC IND CO LTD5 citations60
US6787705B2Sep 7, 2004
Interconnection structure of semiconductor element
OKI ELECTRIC IND CO LTD0 citations49
US6444918B1Sep 3, 2002
Interconnection structure of semiconductor element
OKI ELECTRIC IND CO LTD0 citations49