Inventor

KLOEPFEL DIETHARD

DE4 patents

⚠️ This page may combine multiple inventors who share the name “KLOEPFEL DIETHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

XTREME TECH GMBH

3 patents

US7599470B2Oct 6, 2009

Arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency and minimum contamination

XTREME TECH GMBH22 citations90

US7372057B2May 13, 2008

Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiation

XTREME TECH GMBH12 citations82

US7368742B2May 6, 2008

Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiation

XTREME TECH GMBH10 citations82

HERGENHAN GUIDO

1 patent

US8154000B2Apr 10, 2012

Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources

HERGENHAN GUIDO13 citations71