Inventor
GAEBEL KAI
DE13 patents
Patents
13 patentsUS6995382B2Feb 7, 2006
Arrangement for the generation of intensive short-wave radiation based on a plasma
XTREME TECH GMBH22 citations92
US6882704B2Apr 19, 2005
Radiation source for generating extreme ultraviolet radiation
XTREME TECH GMBH43 citations92
US7599470B2Oct 6, 2009
Arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency and minimum contamination
XTREME TECH GMBH22 citations90
US7476884B2Jan 13, 2009
Device and method for generating extreme ultraviolet (EUV) radiation
XTREME TECH GMBH14 citations84
US7405413B2Jul 29, 2008
Arrangement for providing target material for the generation of short-wavelength electromagnetic radiation
XTREME TECH GMBH10 citations83
US7250621B2Jul 31, 2007
Method and arrangement for the plasma-based generation of intensive short-wavelength radiation
XTREME TECH GMBH17 citations83
US7233013B2Jun 19, 2007
Radiation source for the generation of short-wavelength radiation
XTREME TECH GMBH12 citations83
US7161163B2Jan 9, 2007
Method and arrangement for the plasma-based generation of soft x-radiation
XTREME TECH GMBH14 citations83
US7122814B2Oct 17, 2006
Arrangement for the stabilization of the radiation emission of a plasma
XTREME TECH GMBH11 citations83
US7372057B2May 13, 2008
Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiation
XTREME TECH GMBH12 citations82
US7329014B2Feb 12, 2008
Collector mirror for plasma-based, short-wavelength radiation sources
XTREME TECH GMBH18 citations80
US7274030B2Sep 25, 2007
Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma
XTREME TECH GMBH4 citations62
US7218651B2May 15, 2007
Arrangement for the generation of a pulsed laser beam of high average output
XTREME TECH GMBH2 citations62