Inventor

DORNFEST CHARLES N

US4 patents

⚠️ This page may combine multiple inventors who share the name “DORNFEST CHARLES N”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents

US5680013AOct 21, 1997

Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method of protecting such heated metal surfaces

APPLIED MATERIALS INC177 citations96

US5959409ASep 28, 1999

Ceramic protection for heated metal surfaces of plasma processing chamber exposed to chemically aggressive gaseous environment therein and method protecting such heated metal surfaces

APPLIED MATERIALS INC81 citations94

US5589003ADec 31, 1996

Shielded substrate support for processing chamber

APPLIED MATERIALS INC34 citations89

SUB ONE TECHNOLOGY INC

1 patent

US7629031B2Dec 8, 2009

Plasma enhanced bonding for improving adhesion and corrosion resistance of deposited films

SUB ONE TECHNOLOGY INC9 citations81