Inventor
ANELLA STEVEN M
US16 patents
⚠️ This page may combine multiple inventors who share the name “ANELLA STEVEN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS11875967B2Jan 16, 2024
System apparatus and method for enhancing electrical clamping of substrates using photo-illumination
APPLIED MATERIALS INC0 citations61
US11315819B2Apr 26, 2022
System apparatus and method for enhancing electrical clamping of substrates using photo-illumination
APPLIED MATERIALS INC1 citations61
US11557496B2Jan 17, 2023
Load lock with integrated features
APPLIED MATERIALS INC0 citations59
US11069554B1Jul 20, 2021
Carbon nanotube electrostatic chuck
APPLIED MATERIALS INC0 citations58
US11651986B2May 16, 2023
System for isolating electrodes at cryogenic temperatures
APPLIED MATERIALS INC0 citations53
US11538714B2Dec 27, 2022
System apparatus and method for enhancing electrical clamping of substrates using photo-illumination
APPLIED MATERIALS INC0 citations50
VARIAN SEMICONDUCTOR EQUIPMENT
3 patentsUS9108322B2Aug 18, 2015
Force sensing system for substrate lifting apparatus
VARIAN SEMICONDUCTOR EQUIPMENT9 citations80
US8008176B2Aug 30, 2011
Masked ion implant with fast-slow scan
VARIAN SEMICONDUCTOR EQUIPMENT6 citations73
US8354653B2Jan 15, 2013
Techniques for manufacturing solar cells
VARIAN SEMICONDUCTOR EQUIPMENT1 citations50
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
3 patentsUS10109510B2Oct 23, 2018
Apparatus for improving temperature uniformity of a workpiece
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC5 citations70
US9633875B2Apr 25, 2017
Apparatus for improving temperature uniformity of a workpiece
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations51
US10826218B2Nov 3, 2020
Thermally insulating electrical contact probe
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations49