Inventor
REID KIMBERLY G
US10 patents
⚠️ This page may combine multiple inventors who share the name “REID KIMBERLY G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS7994070B1Aug 9, 2011
Low-temperature dielectric film formation by chemical vapor deposition
TOKYO ELECTRON LTD416 citations98
US7816278B2Oct 19, 2010
In-situ hybrid deposition of high dielectric constant films using atomic layer deposition and chemical vapor deposition
TOKYO ELECTRON LTD523 citations98
US7776763B2Aug 17, 2010
In-situ formation of oxidized aluminum nitride films
TOKYO ELECTRON LTD9 citations83
US7659214B2Feb 9, 2010
Method for growing an oxynitride film on a substrate
TOKYO ELECTRON LTD0 citations51
US7534731B2May 19, 2009
Method for growing a thin oxynitride film on a substrate
TOKYO ELECTRON LTD1 citations51