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Inventor
SHANNON KARENA
US
2 patents
⚠️ This page may combine multiple inventors who share the name “SHANNON KARENA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DRAEGER NERISSA
1 patent
US8846536B2
Sep 30, 2014
Flowable oxide film with tunable wet etch rate
DRAEGER NERISSA
42 citations
95
NOVELLUS SYSTEMS INC
1 patent
US9299559B2
Mar 29, 2016
Flowable oxide film with tunable wet etch rate
NOVELLUS SYSTEMS INC
10 citations
82