Inventor
NA HEUNGYEOL
KR5 patents
⚠️ This page may combine multiple inventors who share the name “NA HEUNGYEOL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG DISPLAY CO LTD
4 patentsUS12512353B2Dec 30, 2025
System for transferring substrate and method for transferring substrate using the same
SAMSUNG DISPLAY CO LTD0 citations49
US11735453B2Aug 22, 2023
System for transferring substrate
SAMSUNG DISPLAY CO LTD0 citations49
US10840123B2Nov 17, 2020
Substrate treatment device providing improved detachment mechanism between substrate and stage and substrate treatment method performed using the same
SAMSUNG DISPLAY CO LTD0 citations45
US9410237B2Aug 9, 2016
Thin film deposition apparatus
SAMSUNG DISPLAY CO LTD0 citations36