Inventor
PARK HAEJOONG
KR5 patents
Patents
5 patentsUS12211672B2Jan 28, 2025
Apparatus and method for plasma etching
SAMSUNG ELECTRONICS CO LTD0 citations55
US11984304B2May 14, 2024
Apparatus and method for plasma etching
SAMSUNG ELECTRONICS CO LTD0 citations55
US11430679B2Aug 30, 2022
Semiconductor manufacturing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations47
US9912258B2Mar 6, 2018
Electrostatic chuck assemblies capable of bidirectional flow of coolant and semiconductor fabricating apparatus having the same
SAMSUNG ELECTRONICS CO LTD1 citations45
US9870900B2Jan 16, 2018
Methods and systems for managing semiconductor manufacturing equipment
SAMSUNG ELECTRONICS CO LTD0 citations38