Inventor
CHAMBERS JAMES J
US34 patents
⚠️ This page may combine multiple inventors who share the name “CHAMBERS JAMES J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
29 patentsUS6936508B2Aug 30, 2005
Metal gate MOS transistors and methods for making the same
TEXAS INSTRUMENTS INC173 citations99
US7229873B2Jun 12, 2007
Process for manufacturing dual work function metal gates in a microelectronics device
TEXAS INSTRUMENTS INC71 citations98
US6852645B2Feb 8, 2005
High temperature interface layer growth for high-k gate dielectric
TEXAS INSTRUMENTS INC130 citations98
US6809370B1Oct 26, 2004
High-k gate dielectric with uniform nitrogen profile and methods for making the same
TEXAS INSTRUMENTS INC81 citations97
US7135361B2Nov 14, 2006
Method for fabricating transistor gate structures and gate dielectrics thereof
TEXAS INSTRUMENTS INC62 citations96
US6503846B1Jan 7, 2003
Temperature spike for uniform nitridization of ultra-thin silicon dioxide layers in transistor gates
TEXAS INSTRUMENTS INC64 citations96
US7528024B2May 5, 2009
Dual work function metal gate integration in semiconductor devices
TEXAS INSTRUMENTS INC21 citations93
US7098516B2Aug 29, 2006
Refractory metal-based electrodes for work function setting in semiconductor devices
TEXAS INSTRUMENTS INC14 citations93
US7005365B2Feb 28, 2006
Structure and method to fabricate self-aligned transistors with dual work function metal gate electrodes
TEXAS INSTRUMENTS INC20 citations92
US6979623B2Dec 27, 2005
Method for fabricating split gate transistor device having high-k dielectrics
TEXAS INSTRUMENTS INC52 citations92
US7115530B2Oct 3, 2006
Top surface roughness reduction of high-k dielectric materials using plasma based processes
TEXAS INSTRUMENTS INC40 citations91
US7067434B2Jun 27, 2006
Hydrogen free integration of high-k gate dielectrics
TEXAS INSTRUMENTS INC16 citations84
US6780719B2Aug 24, 2004
Method for annealing ultra-thin, high quality gate oxide layers using oxidizer/hydrogen mixtures
TEXAS INSTRUMENTS INC13 citations84
US7026218B2Apr 11, 2006
Use of indium to define work function of p-type doped polysilicon
TEXAS INSTRUMENTS INC9 citations74
US6969644B1Nov 29, 2005
Versatile system for triple-gated transistors with engineered corners
TEXAS INSTRUMENTS INC7 citations74
US7560792B2Jul 14, 2009
Reliable high voltage gate dielectric layers using a dual nitridation process
TEXAS INSTRUMENTS INC5 citations73
US7183165B2Feb 27, 2007
Reliable high voltage gate dielectric layers using a dual nitridation process
TEXAS INSTRUMENTS INC5 citations73
US7351626B2Apr 1, 2008
Method for controlling defects in gate dielectrics
TEXAS INSTRUMENTS INC4 citations63
US7321154B2Jan 22, 2008
Refractory metal-based electrodes for work function setting in semiconductor devices
TEXAS INSTRUMENTS INC2 citations63
US7723173B2May 25, 2010
Low temperature polysilicon oxide process for high-K dielectric/metal gate stack
TEXAS INSTRUMENTS INC2 citations62
US7015088B2Mar 21, 2006
High-K gate dielectric defect gettering using dopants
TEXAS INSTRUMENTS INC4 citations62
US7625807B2Dec 1, 2009
Methods and systems to mitigate etch stop clipping for shallow trench isolation fabrication
TEXAS INSTRUMENTS INC2 citations59
US7199021B2Apr 3, 2007
Methods and systems to mitigate etch stop clipping for shallow trench isolation fabrication
TEXAS INSTRUMENTS INC3 citations59
US7799668B2Sep 21, 2010
Formation of uniform silicate gate dielectrics
TEXAS INSTRUMENTS INC0 citations52
US7601578B2Oct 13, 2009
Defect control in gate dielectrics
TEXAS INSTRUMENTS INC1 citations52
US7387956B2Jun 17, 2008
Refractory metal-based electrodes for work function setting in semiconductor devices
TEXAS INSTRUMENTS INC0 citations52
US7119386B2Oct 10, 2006
Versatile system for triple-gated transistors with engineered corners
TEXAS INSTRUMENTS INC0 citations52
US6803611B2Oct 12, 2004
Use of indium to define work function of p-type doped polysilicon
TEXAS INSTRUMENTS INC1 citations52
US7968443B2Jun 28, 2011
Cross-contamination control for processing of circuits comprising MOS devices that include metal comprising high-K dielectrics
TEXAS INSTRUMENTS INC0 citations42