Inventor
STEVENS RONALD R
US9 patents
⚠️ This page may combine multiple inventors who share the name “STEVENS RONALD R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
6 patentsUS6042324AMar 28, 2000
Multi-stage single-drive FOUP door system
ASM INC91 citations97
US6322116B1Nov 27, 2001
Non-contact end effector
ASM INC94 citations96
US6242718B1Jun 5, 2001
Wafer holder
ASM INC62 citations95
US6465761B2Oct 15, 2002
Heat lamps for zone heating
ASM INC34 citations92
US6162006ADec 19, 2000
Stackable cassette for use with wafer cassettes
ASM INC12 citations73
US6551044B1Apr 22, 2003
Bellows isolation for index platforms
ASM INC9 citations72