Inventor
WU TZUNG-CHEN
TW5 patents
Patents
5 patentsUS12196491B2Jan 14, 2025
Adaptive baking method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11204200B2Dec 21, 2021
Adaptive baking method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10354908B2Jul 16, 2019
Semiconductor tool with a shield
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations57
US10006717B2Jun 26, 2018
Adaptive baking system and method of using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10755961B2Aug 25, 2020
Semiconductor tool with a shield
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47