Inventor
Yu Tzu Wei
TW4 patents
Patents
4 patentsUS12500206B2Dec 16, 2025
Mechanical wafer alignment detection for bonding process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11688717B2Jun 27, 2023
Mechanical wafer alignment detection for bonding process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10354908B2Jul 16, 2019
Semiconductor tool with a shield
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations57
US10755961B2Aug 25, 2020
Semiconductor tool with a shield
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47