Inventor
KUHNKE MARKUS
DE5 patents
Patents
5 patentsUS11897758B2Feb 13, 2024
Electrical contacting and method for producing an electrical contacting
BOSCH GMBH ROBERT0 citations58
US10889491B2Jan 12, 2021
Method for producing a micromechanical element
BOSCH GMBH ROBERT0 citations57
US11939215B2Mar 26, 2024
Microelectromechanical structure including a functional element situated in a cavity of the microelectromechanical structure
BOSCH GMBH ROBERT0 citations50
US10643896B2May 5, 2020
Method for producing at least one via in a wafer
BOSCH GMBH ROBERT0 citations48
US12160215B2Dec 3, 2024
Method for manufacturing a piezoelectric resonator
BOSCH GMBH ROBERT0 citations42