Inventor
YI RAEWON
KR4 patents
Patents
4 patentsUS11635371B2Apr 25, 2023
Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method
SAMSUNG ELECTRONICS CO LTD3 citations69
US11506968B2Nov 22, 2022
Method of annealing reflective photomask by using laser
SAMSUNG ELECTRONICS CO LTD3 citations69
US11934092B2Mar 19, 2024
Method of annealing reflective photomask by using laser
SAMSUNG ELECTRONICS CO LTD0 citations58
US11852583B2Dec 26, 2023
Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method
SAMSUNG ELECTRONICS CO LTD0 citations58