Inventor · disambiguated record
Hakseung Han
Also filed as: HAN HAKSEUNG
6 granted patents·2 pending applications·7 citations·filing 2020–2024
74Inventor score
Files withSAMSUNG ELECTRONICS CO LTD8
Top patents by PatentIndex Score
8 records- 0192US11635371B2Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the methodSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Apr 25, 2023·3 cites·16 claims
- 0292US11506968B2Method of annealing reflective photomask by using laserSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Nov 22, 2022·3 cites·20 claims
- 0379US11562477B2Apparatus and method of measuring uniformity based on pupil image and method of manufacturing mask by using the methodSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jan 24, 2023·1 cites·16 claims
- 0477US11852583B2Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the methodSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Dec 26, 2023·0 cites·12 claims
- 0575US11934092B2Method of annealing reflective photomask by using laserSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Mar 19, 2024·0 cites·18 claims
- 0674US2024184192A1Method of annealing reflective photomask by using laserSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0769US12260539B2Apparatus and method of measuring uniformity based on pupil image and method of manufacturing mask by using the methodSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Mar 25, 2025·0 cites·11 claims
- 0842US2021033959A1Extreme ultraviolet photomask manufacturing method and semiconductor device fabrication method including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Application pending·0 cites
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