Inventor
PARK MINJOON
US16 patents
⚠️ This page may combine multiple inventors who share the name “PARK MINJOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS12354842B2Jul 8, 2025
In-situ focus ring coating
TOKYO ELECTRON LTD0 citations61
US12334356B2Jun 17, 2025
Plasma etching tools and systems
TOKYO ELECTRON LTD0 citations61
US12040176B2Jul 16, 2024
Technologies for high aspect ratio carbon etching with inserted charge dissipation layer
TOKYO ELECTRON LTD0 citations59
US12563990B2Feb 24, 2026
Densification and reduction of selectively deposited Si protective layer for mask selectivity improvement in HAR etching
TOKYO ELECTRON LTD0 citations55
US12526990B2Jan 13, 2026
Metal hardmasks
TOKYO ELECTRON LTD0 citations55
US12463048B2Nov 4, 2025
Methods for forming semiconductor devices using metal hard masks
TOKYO ELECTRON LTD0 citations55
US12512329B2Dec 30, 2025
Multi level contact etch
TOKYO ELECTRON LTD0 citations44
SAMSUNG ELECTRONICS CO LTD
4 patentsUS9305802B2Apr 5, 2016
Methods of forming semiconductor devices using hard masks
SAMSUNG ELECTRONICS CO LTD5 citations71
US10497597B2Dec 3, 2019
Electrostatic chuck assembly and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD3 citations68
US11487854B2Nov 1, 2022
Electronic device for protecting application from abnormal environment and operating method thereof
SAMSUNG ELECTRONICS CO LTD0 citations54
US9123657B2Sep 1, 2015
Method of fabricating semiconductor devices
SAMSUNG ELECTRONICS CO LTD0 citations50
ALATION INC
2 patentsSAMSUNG DISPLAY CO LTD
2 patentsUS10054496B2Aug 21, 2018
Temperature sensing device, temperature sensor using the same, and wearable device having the same
SAMSUNG DISPLAY CO LTD4 citations71
US10439128B2Oct 8, 2019
Piezoelectric device, piezoelectric sensor using the same, and wearable device having the same
SAMSUNG DISPLAY CO LTD0 citations50