Inventor
SUGIYAMA MITSUNORI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “SUGIYAMA MITSUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
6 patentsUS11667007B2Jun 6, 2023
Polishing apparatus and polishing method
EBARA CORP1 citations62
US12547154B2Feb 10, 2026
Substrate processing apparatus and non-transitory computer readable medium
EBARA CORP0 citations48
US10890899B2Jan 12, 2021
Method of semiconductor manufacturing apparatus and non-transitory computer-readable storage medium storing a program of causing computer to execute design method of semiconductor manufacturing apparatus
EBARA CORP0 citations48
US9904280B2Feb 27, 2018
Substrate treatment apparatus and control device
EBARA CORP1 citations48
US10317890B2Jun 11, 2019
Failure detection apparatus for substrate processing apparatus, and substrate processing apparatus
EBARA CORP0 citations40
US9737973B2Aug 22, 2017
Substrate processing apparatus
EBARA CORP0 citations36