P

Inventor

TAKAGAKI TETSUYA

JP7 patents
⚠️ This page may combine multiple inventors who share the name “TAKAGAKI TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

3 patents
US5001327AMar 19, 1991

Apparatus and method for performing heat treatment on semiconductor wafers

HITACHI LTD146 citations95
US4282825AAug 11, 1981

Surface treatment device

HITACHI LTD45 citations85
US4468195AAug 28, 1984

Thermal treatment apparatus

HITACHI LTD24 citations80

AGENCY IND SCIENCE TECHN

1 patent
US6514425B1Feb 4, 2003

Dry etching gas

AGENCY IND SCIENCE TECHN23 citations89

JP THE AGENCY OF IND SCIENCE A

1 patent
US6322715B1Nov 27, 2001

Gas composition for dry etching and process of dry etching

JP THE AGENCY OF IND SCIENCE A9 citations72

JAPAN AS REPRESENTED BY THE DI

1 patent
US6383403B1May 7, 2002

Dry etching method

JAPAN AS REPRESENTED BY THE DI12 citations71

YOSHIDA NAOHIRO

1 patent
US8757403B2Jun 24, 2014

Car equipment protection structure for railcar

YOSHIDA NAOHIRO3 citations59