Inventor
SHY SHYI-LONG
TW5 patents
⚠️ This page may combine multiple inventors who share the name “SHY SHYI-LONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
4 patentsUS5533634AJul 9, 1996
Quantum chromeless lithography
UNITED MICROELECTRONICS CORP16 citations72
US6071658AJun 6, 2000
Proximity effect correction method for mask production
UNITED MICROELECTRONICS CORP10 citations70
US5478679ADec 26, 1995
Half-tone self-aligning phase shifting mask
UNITED MICROELECTRONICS CORP14 citations68
US5985516ANov 16, 1999
Electron beam imaging method using conducting polyaniline material
UNITED MICROELECTRONICS CORP5 citations59