Inventor
SUGIYAMA AKIYUKI
JP30 patents
⚠️ This page may combine multiple inventors who share the name “SUGIYAMA AKIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
16 patentsUS7923703B2Apr 12, 2011
Sample dimension inspecting/measuring method and sample dimension inspecting/measuring apparatus
HITACHI HIGH TECH CORP18 citations92
US7732792B2Jun 8, 2010
Pattern measurement apparatus
HITACHI HIGH TECH CORP23 citations92
US7679055B2Mar 16, 2010
Pattern displacement measuring method and pattern measuring device
HITACHI HIGH TECH CORP16 citations92
US7507961B2Mar 24, 2009
Method and apparatus of pattern inspection and semiconductor inspection system using the same
HITACHI HIGH TECH CORP18 citations92
US7449689B2Nov 11, 2008
Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method
HITACHI HIGH TECH CORP23 citations92
US8355562B2Jan 15, 2013
Pattern shape evaluation method
HITACHI HIGH TECH CORP9 citations84
US8019161B2Sep 13, 2011
Method, device and computer program of length measurement
HITACHI HIGH TECH CORP14 citations84
US7518110B2Apr 14, 2009
Pattern measuring method and pattern measuring device
HITACHI HIGH TECH CORP13 citations84
US7925095B2Apr 12, 2011
Pattern matching method and computer program for executing pattern matching
HITACHI HIGH TECH CORP6 citations74
US7889909B2Feb 15, 2011
Pattern matching method and pattern matching program
HITACHI HIGH TECH CORP6 citations63
US7772554B2Aug 10, 2010
Charged particle system
HITACHI HIGH TECH CORP2 citations61
US10545018B2Jan 28, 2020
Pattern measurement device, and computer program for measuring pattern
HITACHI HIGH TECH CORP1 citations59
US12498337B2Dec 16, 2025
Measurement system and measurement method
HITACHI HIGH TECH CORP0 citations52
US10732512B2Aug 4, 2020
Image processor, method for generating pattern using self-organizing lithographic techniques and computer program
HITACHI HIGH TECH CORP0 citations51
US7941008B2May 10, 2011
Pattern search method
HITACHI HIGH TECH CORP0 citations41
US9804107B2Oct 31, 2017
Pattern measurement device and computer program for evaluating patterns based on centroids of the patterns
HITACHI HIGH TECH CORP0 citations36
SUGIYAMA AKIYUKI
4 patentsUS8515153B2Aug 20, 2013
System and method of image processing, and scanning electron microscope
SUGIYAMA AKIYUKI13 citations83
US8094920B2Jan 10, 2012
System and method of image processing, and scanning electron microscope
SUGIYAMA AKIYUKI8 citations83
US8244042B2Aug 14, 2012
Pattern matching method and computer program for executing pattern matching
SUGIYAMA AKIYUKI0 citations51
US9704235B2Jul 11, 2017
Semiconductor inspection system
SUGIYAMA AKIYUKI0 citations40
MATSUOKA RYOICHI
4 patentsUS8445871B2May 21, 2013
Pattern measurement apparatus
MATSUOKA RYOICHI6 citations82
US8311314B2Nov 13, 2012
Pattern measuring method and pattern measuring device
MATSUOKA RYOICHI6 citations72
US8788242B2Jul 22, 2014
Pattern measurement apparatus
MATSUOKA RYOICHI3 citations56
US8867818B2Oct 21, 2014
Method of creating template for matching, as well as device for creating template
MATSUOKA RYOICHI1 citations51