Inventor
LAM ZADIG CHEUNG-CHING
US4 patents
Patents
4 patentsUS5734594AMar 31, 1998
Method and system for enhancement of wafer alignment accuracy
CHARTERED SEMICONDUCTOR MFG8 citations71
US6235437B1May 22, 2001
Multi-segment global alignment mark
CHARTERED SEMICONDUCTOR MFG10 citations70
US6022649AFeb 8, 2000
Wafer stepper method utilizing a multi-segment global alignment mark
CHARTERED SEMICONDUCTOR MFG5 citations70
US6982215B1Jan 3, 2006
N type impurity doping using implantation of P2+ ions or As2+ Ions
CHARTERED SEMICONDUCTOR MFG6 citations49