Inventor · disambiguated record
Toshimoto Nakagawa
Also filed as: NAKAGAWA TOSHIMOTO
9 granted patents·2 pending applications·139 citations·filing 1992–2003
89Inventor score
Files withNAGASE & CO LTD4HIRAMA RIKA KENKYUJO LTD2NAGASE CMS TECHNOLOGY CO LTD2HIRAMA RIKA KENKYUJIO LTD1
Top patents by PatentIndex Score
11 records- 0179US6302600B1Apparatus for treating surface of boardsNAGASE & CO LTD·Filed 2000·Granted Oct 16, 2001·26 cites·24 claims
- 0274US5223881AApparatus for controlling developing solutionHIRAMA RIKA KENKYUJIO LTD·Filed 1992·Granted Jun 29, 1993·36 cites·4 claims
- 0372US6623183B2Developer producing equipment and methodNAGASE & CO LTD·Filed 2002·Granted Sep 23, 2003·17 cites·21 claims
- 0467US6752545B2Alkali-based treating liquid, treating liquid adjusting method and equipment, treating liquid supplying method and equipmentNAGASE & CO LTD·Filed 2002·Granted Jun 22, 2004·10 cites·10 claims
- 0561US6588927B2Purified developer producing equipment and methodNAGASE & CO LTD·Filed 2002·Granted Jul 8, 2003·10 cites·15 claims
- 0651US5896874AApparatus for controlling resist stripping solutionHIRAMA RIKA KENKYUJO LTD·Filed 1997·Granted Apr 27, 1999·21 cites·4 claims
- 0748US7109037B2Water-based resist stripping liquid management apparatus and water-based resist stripping liquid management methodNAGASE CMS TECHNOLOGY CO LTD·Filed 2002·Granted Sep 19, 2006·4 cites·1 claims
- 0843US5671760AApparatus for controlling resist stripping solutionHIRAMA RIKA KENKYUJO LTD·Filed 1994·Granted Sep 30, 1997·13 cites·4 claims
- 0942US7101517B2Processing solution preparation and supply method and apparatusNAGASE CMS TECHNOLOGY CO LTD·Filed 2003·Granted Sep 5, 2006·2 cites·6 claims
- 1033US2004011463A1Resist stripping equipmentFiled 2003·Application pending·0 cites
- 1132US2002197079A1Non-water-based resist stripping liquid management apparatus and non-water-based resist stripping liquid management methodFiled 2002·Application pending·0 cites
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