Inventor
BARTLETT WILLIAM R
US5 patents
Patents
5 patentsUS5951373ASep 14, 1999
Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning
APPLIED MATERIALS INC62 citations94
US5775983AJul 7, 1998
Apparatus and method for conditioning a chemical mechanical polishing pad
APPLIED MATERIALS INC82 citations94
US6136715AOct 24, 2000
Circumferentially oscillating carousel apparatus for sequentially polishing substrates
APPLIED MATERIALS INC33 citations91
US6506099B1Jan 14, 2003
Driving a carrier head in a wafer polishing system
APPLIED MATERIALS INC17 citations81
US6245680B1Jun 12, 2001
Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning
APPLIED MATERIALS INC2 citations61