Inventor
OVERZET LAWRENCE J
US7 patents
⚠️ This page may combine multiple inventors who share the name “OVERZET LAWRENCE J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV TEXAS
5 patentsUS6459066B1Oct 1, 2002
Transmission line based inductively coupled plasma source with stable impedance
UNIV TEXAS58 citations95
US6875700B2Apr 5, 2005
Ion-Ion plasma processing with bias modulation synchronized to time-modulated discharges
UNIV TEXAS26 citations92
US6028285AFeb 22, 2000
High density plasma source for semiconductor processing
UNIV TEXAS79 citations92
US6097157AAug 1, 2000
System for ion energy control during plasma processing
UNIV TEXAS11 citations71
US9018088B2Apr 28, 2015
Method of manufacturing electrodes using carbon nanotube sheets
UNIV TEXAS1 citations49