Inventor
AGARWAL VISHNU
US3 patents
Patents
3 patentsUS6521544B1Feb 18, 2003
Method of forming an ultra thin dielectric film
MICRON TECHNOLOGY INC17 citations88
US7535047B2May 19, 2009
Semiconductor device containing an ultra thin dielectric film or dielectric layer
MICRON TECHNOLOGY INC0 citations48
US6821838B2Nov 23, 2004
Method of forming an ultra thin dielectric film and a semiconductor device incorporating the same
MICRON TECHNOLOGY INC0 citations48