Inventor
SERWAZI MARCUS
DE6 patents
Patents
6 patentsUS6563853B2May 13, 2003
Gas performance control system for gas discharge lasers
LAMBDA PHYSIK AG46 citations94
US6700916B1Mar 2, 2004
E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systems
LAMBDA PHYSIK AG23 citations91
US6549555B2Apr 15, 2003
Gas performance control system for gas discharge lasers
LAMBDA PHYSIK AG14 citations89
US6735225B2May 11, 2004
Chirp compensation method and apparatus
LAMBDA PHYSIK AG18 citations82
US6760358B1Jul 6, 2004
Line-narrowing optics module having improved mechanical performance
LAMBDA PHYSIK AG15 citations81
US6597462B2Jul 22, 2003
Laser wavelength and bandwidth monitor
LAMBDA PHYSIK AG7 citations72