Inventor

WEED ALLAN

US2 patents

⚠️ This page may combine multiple inventors who share the name “WEED ALLAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

1 patent

US7789443B2Sep 7, 2010

Workpiece gripping device

AXCELIS TECH INC28 citations89

(unassigned)

1 patent

US6734439B2May 11, 2004

Wafer pedestal tilt mechanism and cooling system

2 citations56