Inventor
LOWE-WEBB ROGER R
US13 patents
⚠️ This page may combine multiple inventors who share the name “LOWE-WEBB ROGER R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NANOMETRICS INC
12 patentsUS7061615B1Jun 13, 2006
Spectroscopically measured overlay target
NANOMETRICS INC221 citations98
US6982793B1Jan 3, 2006
Method and apparatus for using an alignment target with designed in offset
NANOMETRICS INC216 citations98
US6949462B1Sep 27, 2005
Measuring an alignment target with multiple polarization states
NANOMETRICS INC77 citations98
US7046361B1May 16, 2006
Positioning two elements using an alignment target with a designed offset
NANOMETRICS INC75 citations97
US6992764B1Jan 31, 2006
Measuring an alignment target with a single polarization state
NANOMETRICS INC115 citations97
US6522406B1Feb 18, 2003
Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizer
NANOMETRICS INC119 citations97
US7230705B1Jun 12, 2007
Alignment target with designed in offset
NANOMETRICS INC69 citations95
US7115858B1Oct 3, 2006
Apparatus and method for the measurement of diffracting structures
NANOMETRICS INC55 citations95
US7372565B1May 13, 2008
Spectrometer measurement of diffracting structures
NANOMETRICS INC46 citations92
US7236244B1Jun 26, 2007
Alignment target to be measured with multiple polarization states
NANOMETRICS INC36 citations92
US6958819B1Oct 25, 2005
Encoder with an alignment target
NANOMETRICS INC28 citations92
US6970255B1Nov 29, 2005
Encoder measurement based on layer thickness
NANOMETRICS INC15 citations83