Inventor

HIFUMI TAKASHI

JP4 patents

Patents

4 patents

US7982416B2Jul 19, 2011

Circular accelerator

MITSUBISHI ELECTRIC CORP45 citations93

US5057766AOct 15, 1991

Apparatus for detecting position of charged particle

MITSUBISHI ELECTRIC CORP10 citations72

US5953492ASep 14, 1999

Method of manufacturing X-ray mask and heating apparatus

MITSUBISHI ELECTRIC CORP6 citations71

US5834142ANov 10, 1998

Method of manufacturing X-ray mask and heating apparatus

MITSUBISHI ELECTRIC CORP3 citations60