Inventor
MIYAMOTO MATSUTARO
JP43 patents
⚠️ This page may combine multiple inventors who share the name “MIYAMOTO MATSUTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
42 patentsUSD802723SNov 14, 2017
Sealing ring
EBARA CORP34 citations94
US6926493B1Aug 9, 2005
Turbo-molecular pump
EBARA CORP33 citations92
US6793466B2Sep 21, 2004
Vacuum pump
EBARA CORP43 citations92
US6589009B1Jul 8, 2003
Turbo-molecular pump
EBARA CORP20 citations92
US6514348B2Feb 4, 2003
Substrate processing apparatus
EBARA CORP49 citations92
US6332752B2Dec 25, 2001
Turbo-molecular pump
EBARA CORP15 citations92
US5679992AOct 21, 1997
Bearing unit
EBARA CORP38 citations91
USD948438SApr 12, 2022
Electrical contact
EBARA CORP6 citations86
USD825629SAug 14, 2018
Electrical contact
EBARA CORP11 citations84
USD797674SSep 19, 2017
Electrical contact
EBARA CORP8 citations84
USD776621SJan 17, 2017
Electrical contact
EBARA CORP7 citations84
USD771571SNov 15, 2016
Electrical contact
EBARA CORP7 citations84
US6617722B2Sep 9, 2003
Magnetic levitation rotating machine
EBARA CORP13 citations83
US6220831B1Apr 24, 2001
Turbomolecular pump
EBARA CORP18 citations83
USD910579SFeb 16, 2021
Electrical contact
EBARA CORP2 citations73
US10738390B2Aug 11, 2020
Substrate holder and plating apparatus using the same
EBARA CORP2 citations73
US10577713B2Mar 3, 2020
Substrate holder, plating apparatus, and method for manufacturing substrate holder
EBARA CORP4 citations73
USD847762SMay 7, 2019
Electrical contact
EBARA CORP3 citations73
USD835760SDec 11, 2018
Sealing ring
EBARA CORP2 citations73
US9970459B2May 15, 2018
Vacuum pump connecting apparatus and method for installing vacuum pump connecting apparatus
EBARA CORP2 citations73
US6217278B1Apr 17, 2001
Turbomolecular pump
EBARA CORP10 citations73
US6062810AMay 16, 2000
Turbomolecular pump
EBARA CORP12 citations73
US6398524B1Jun 4, 2002
Magnetic bearing control device and turbo-molecular pump device
EBARA CORP10 citations72
US9508526B2Nov 29, 2016
Top opening-closing mechanism and inspection apparatus
EBARA CORP2 citations63
US7645126B2Jan 12, 2010
Vacuum pump and semiconductor manufacturing apparatus
EBARA CORP5 citations63
US12288707B2Apr 29, 2025
Substrate holder
EBARA CORP0 citations62
US11697886B2Jul 11, 2023
Substrate holder
EBARA CORP1 citations62
US11676837B2Jun 13, 2023
Substrate holder
EBARA CORP0 citations62
US11236435B2Feb 1, 2022
Method for holding substrate on substrate holder
EBARA CORP0 citations62
USD908640SJan 26, 2021
Electrical contact
EBARA CORP0 citations62
US10793967B2Oct 6, 2020
Substrate holder and plating apparatus using the same
EBARA CORP1 citations62
US6953317B2Oct 11, 2005
Turbo-molecular pump
EBARA CORP2 citations62
US11718925B2Aug 8, 2023
Holder for holding substrate and system for plating
EBARA CORP0 citations54
US11299817B2Apr 12, 2022
Holder for holding substrate and system for plating
EBARA CORP0 citations54
US11668018B2Jun 6, 2023
Contact structure, substrate holder, apparatus for plating, and method of feeding electric power to substrate
EBARA CORP0 citations52
US11542625B2Jan 3, 2023
Substrate holder
EBARA CORP0 citations52
US11232972B2Jan 25, 2022
Substrate holder, plating device, and plating method of substrate
EBARA CORP0 citations52
US11214888B2Jan 4, 2022
Seal used for substrate holder
EBARA CORP0 citations52
USD839839SFeb 5, 2019
Electrical contact
EBARA CORP0 citations52
US11384447B2Jul 12, 2022
Substrate holder, plating apparatus, method for manufacturing substrate holder, and method for holding substrate
EBARA CORP0 citations51
US11248308B2Feb 15, 2022
Substrate holder and plating apparatus with substrate holder
EBARA CORP0 citations48
US9594014B2Mar 14, 2017
Installation structure of length meter for measuring a displacement of an object placed in vacuum
EBARA CORP0 citations42