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Inventor
KIM KYOUNGSHIK
KR
2 patents
Patents
2 patents
US8052853B2
Nov 8, 2011
Sputtering apparatus and method of preventing damage thereof
LG DISPLAY CO LTD
0 citations
43
US7820016B2
Oct 26, 2010
Sputtering apparatus and method of preventing damage thereof
LG DISPLAY CO LTD
1 citations
43