Inventor
VAN ES JOHANNES
NL4 patents
⚠️ This page may combine multiple inventors who share the name “VAN ES JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JACOBS JOHANNES HENRICUS WILHELMUS
2 patentsUS9268236B2Feb 23, 2016
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder
JACOBS JOHANNES HENRICUS WILHELMUS5 citations81
US8705009B2Apr 22, 2014
Heat pipe, lithographic apparatus and device manufacturing method
JACOBS JOHANNES HENRICUS WILHELMUS0 citations48