Inventor

YANO HIDETSUGU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “YANO HIDETSUGU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US9721813B2Aug 1, 2017

Liquid processing apparatus with cleaning jig

TOKYO ELECTRON LTD3 citations70

US9224624B2Dec 29, 2015

Liquid processing method

TOKYO ELECTRON LTD0 citations48

INADA TAKAO

1 patent

US8951359B2Feb 10, 2015

Liquid processing apparatus, liquid processing method and computer-readable storage medium storing liquid processing program

INADA TAKAO4 citations64