Inventor

GRAESCHUS VOLKER

DE4 patents

⚠️ This page may combine multiple inventors who share the name “GRAESCHUS VOLKER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

2 patents

US9146475B2Sep 29, 2015

Projection exposure system and projection exposure method

ZEISS CARL SMT GMBH3 citations60

US9665006B2May 30, 2017

Projection exposure method and projection exposure apparatus for microlithography

ZEISS CARL SMT GMBH0 citations48

ULRICH WILHELM

2 patents

US8659744B2Feb 25, 2014

Method for correcting a lithography projection objective, and such a projection objective

ULRICH WILHELM0 citations45

US8174676B2May 8, 2012

Method for correcting a lithography projection objective, and such a projection objective

ULRICH WILHELM1 citations45