Inventor
SUN WEI-DER
TW3 patents
Patents
3 patentsUS11952656B2Apr 9, 2024
PVD system and collimator
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US12416074B2Sep 16, 2025
PVD system and collimator
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US9871035B2Jan 16, 2018
Semiconductor device with metal silicide blocking region and method of manufacturing the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations42