Inventor
LUOH TUUNG
TW35 patents
⚠️ This page may combine multiple inventors who share the name “LUOH TUUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MACRONIX INT CO LTD
24 patentsUS7382054B2Jun 3, 2008
Method for forming self-aligned contacts and local interconnects simultaneously
MACRONIX INT CO LTD14 citations84
US7888804B2Feb 15, 2011
Method for forming self-aligned contacts and local interconnects simultaneously
MACRONIX INT CO LTD5 citations74
US7045419B2May 16, 2006
Elimination of the fast-erase phenomena in flash memory
MACRONIX INT CO LTD7 citations73
US10388664B2Aug 20, 2019
Integrated circuit device with layered trench conductors
MACRONIX INT CO LTD5 citations71
US9589086B2Mar 7, 2017
Method for measuring and analyzing surface structure of chip or wafer
MACRONIX INT CO LTD5 citations71
US7629265B2Dec 8, 2009
Cleaning method for use in semiconductor device fabrication
MACRONIX INT CO LTD3 citations63
US10892265B2Jan 12, 2021
Word line structure and method of manufacturing the same
MACRONIX INT CO LTD0 citations62
US7148105B2Dec 12, 2006
Method for forming polysilicon floating gate
MACRONIX INT CO LTD3 citations62
US6962861B2Nov 8, 2005
Method of forming a polysilicon layer comprising microcrystalline grains
MACRONIX INT CO LTD4 citations62
US9006003B1Apr 14, 2015
Method of detecting bitmap failure associated with physical coordinate
MACRONIX INT CO LTD3 citations61
US7498257B2Mar 3, 2009
Methods for metal ARC layer formation
MACRONIX INT CO LTD2 citations58
US10497652B1Dec 3, 2019
Semiconductor substrate and semiconductor device
MACRONIX INT CO LTD0 citations52
US7938972B2May 10, 2011
Fabrication method of electronic device
MACRONIX INT CO LTD0 citations52
US7517780B2Apr 14, 2009
Method for eliminating polycide voids through nitrogen implantation
MACRONIX INT CO LTD0 citations52
US7335610B2Feb 26, 2008
Ultraviolet blocking layer
MACRONIX INT CO LTD1 citations52
US9116108B1Aug 25, 2015
Electron beam inspection optimization
MACRONIX INT CO LTD1 citations51
US8034691B2Oct 11, 2011
HDP-CVD process, filling-in process utilizing HDP-CVD, and HDP-CVD system
MACRONIX INT CO LTD0 citations51
US7625819B2Dec 1, 2009
Interconnection process
MACRONIX INT CO LTD0 citations51
US9244112B2Jan 26, 2016
Method for detecting an electrical defect of contact/via plugs
MACRONIX INT CO LTD1 citations50
US8383515B2Feb 26, 2013
Methodology for wordline short reduction
MACRONIX INT CO LTD1 citations49
US8003519B2Aug 23, 2011
Systems and methods for back end of line processing of semiconductor circuits
MACRONIX INT CO LTD0 citations47
US7951707B2May 31, 2011
Etching method for semiconductor element
MACRONIX INT CO LTD0 citations42
US9869712B2Jan 16, 2018
Method and system for detecting defects of wafer by wafer sort
MACRONIX INT CO LTD0 citations41
US7846835B2Dec 7, 2010
Contact barrier layer deposition process
MACRONIX INT CO LTD0 citations41
LUOH TUUNG
7 patentsUS8519541B2Aug 27, 2013
Semiconductor device having plural conductive layers disposed within dielectric layer
LUOH TUUNG0 citations51
US8085390B2Dec 27, 2011
Multivariate monitoring method for plasma process machine
LUOH TUUNG0 citations50
US8669184B2Mar 11, 2014
Method for improving flatness of a layer deposited on polycrystalline layer
LUOH TUUNG0 citations49
US8520194B2Aug 27, 2013
Method of forming a deposited material by utilizing a multi-step deposition/etch/deposition (D/E/D) process
LUOH TUUNG0 citations48
US8580680B2Nov 12, 2013
Metal silicide formation
LUOH TUUNG0 citations47
US8828861B2Sep 9, 2014
Method for fabricating conductive lines of a semiconductor device
LUOH TUUNG0 citations38
US8184288B2May 22, 2012
Method of depositing a silicon-containing material by utilizing a multi-step fill-in process in a deposition machine
LUOH TUUNG0 citations38