Inventor
HSIEH SHENG-HUI
TW4 patents
⚠️ This page may combine multiple inventors who share the name “HSIEH SHENG-HUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LUOH TUUNG
3 patentsUS8520194B2Aug 27, 2013
Method of forming a deposited material by utilizing a multi-step deposition/etch/deposition (D/E/D) process
LUOH TUUNG0 citations48
US8580680B2Nov 12, 2013
Metal silicide formation
LUOH TUUNG0 citations47
US8184288B2May 22, 2012
Method of depositing a silicon-containing material by utilizing a multi-step fill-in process in a deposition machine
LUOH TUUNG0 citations38