Inventor
HIMICS RICHARD JOSEPH
7 patents
Patents
7 patentsUS3935332AJan 27, 1976
Development of poly(1-methyl-1-cyclopentene-SO2) electron beam resist
RCA CORP32 citations81
US3935331AJan 27, 1976
Preparation of olefin SO2 copolymer electron beam resist films and use of same for recording
RCA CORP29 citations77
US4045318AAug 30, 1977
Method of transferring a surface relief pattern from a poly(olefin sulfone) layer to a metal layer
RCA CORP15 citations72
US4059449ANov 22, 1977
Photoresist containing a thiodipropionate compound
RCA CORP7 citations65
US4007295AFeb 8, 1977
Olefin-SO2 copolymer film adhesion to a substrate
RCA CORP2 citations60
US4054454AOct 18, 1977
Photosensitive copolymer on silicon support
RCA CORP3 citations58
US3964909AJun 22, 1976
Method of preparing a pattern on a silicon wafer
RCA CORP3 citations58