Inventor
UH HYUNG SOO
KR7 patents
⚠️ This page may combine multiple inventors who share the name “UH HYUNG SOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS6613621B2Sep 2, 2003
Methods of forming self-aligned contact pads using a damascene gate process
SAMSUNG ELECTRONICS CO LTD71 citations94
US6403431B1Jun 11, 2002
Method of forming in an insulating layer a trench that exceeds the photolithographic resolution limits
SAMSUNG ELECTRONICS CO LTD21 citations92
US6391736B1May 21, 2002
Method for fabricating a capacitor of a semiconductor device and a capacitor made thereby
SAMSUNG ELECTRONICS CO LTD31 citations91
US6828617B2Dec 7, 2004
Method for fabricating a capacitor of a semiconductor device and a capacitor made thereby
SAMSUNG ELECTRONICS CO LTD8 citations72