Inventor
SHAW THOMAS MCCARROLL
US17 patents
Patents
17 patentsUS6090659AJul 18, 2000
Lead silicate based capacitor structures
IBM397 citations98
US6088216AJul 11, 2000
Lead silicate based capacitor structures
IBM50 citations95
US6388285B1May 14, 2002
Feram cell with internal oxygen source and method of oxygen release
IBM30 citations92
US6333202B1Dec 25, 2001
Flip FERAM cell and method to form same
IBM27 citations92
US6255122B1Jul 3, 2001
Amorphous dielectric capacitors on silicon
IBM45 citations92
US5926360AJul 20, 1999
Metallized oxide structure and fabrication
IBM25 citations90
US7357977B2Apr 15, 2008
Ultralow dielectric constant layer with controlled biaxial stress
IBM10 citations83
US7745863B2Jun 29, 2010
Flip FERAM cell and method to form same
IBM5 citations74
US6555859B2Apr 29, 2003
Flip FERAM cell and method to form same
IBM3 citations73
US6271076B1Aug 7, 2001
Method for fabricating a novel metallized oxide structure
IBM13 citations71
US7402857B2Jul 22, 2008
Flip FERAM cell and method to form same
IBM2 citations63
US7186573B2Mar 6, 2007
Flip FERAM cell and method to form same
IBM2 citations62
US6503641B2Jan 7, 2003
Interconnects with Ti-containing liners
IBM5 citations62
US6211543B1Apr 3, 2001
Lead silicate based capacitor structures
IBM2 citations62
US7217969B2May 15, 2007
Flip FERAM cell and method to form same
IBM0 citations52
US6773982B2Aug 10, 2004
Feram cell with internal oxygen source and method of oxygen release
IBM0 citations52
US10755404B2Aug 25, 2020
Integrated circuit defect detection using pattern images
IBM0 citations41