Inventor
ISHIZAWA SHIGERU
JP21 patents
⚠️ This page may combine multiple inventors who share the name “ISHIZAWA SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
20 patentsUS7837425B2Nov 23, 2010
Transportation apparatus and drive mechanism
TOKYO ELECTRON LTD1,055 citations98
US6328864B1Dec 11, 2001
Vacuum processing apparatus
TOKYO ELECTRON LTD304 citations98
US7622006B2Nov 24, 2009
Processed body carrying device, and processing system with carrying device
TOKYO ELECTRON LTD41 citations92
US6466835B1Oct 15, 2002
Deadlock avoidance method and treatment system for object to be treated
TOKYO ELECTRON LTD22 citations92
US6162010ADec 19, 2000
Method for recovering object to be treated after interruption
TOKYO ELECTRON LTD26 citations92
US6144926ANov 7, 2000
Method of sensing access positions of arm
TOKYO ELECTRON LTD30 citations92
US6510365B1Jan 21, 2003
Carrier system positioning method
TOKYO ELECTRON LTD57 citations91
US5754780AMay 19, 1998
Apparatus and method for performing serial communication between master and slave devices
TOKYO ELECTRON LTD48 citations89
US10490392B2Nov 26, 2019
Focus ring replacement method and plasma processing system
TOKYO ELECTRON LTD9 citations84
US10403525B2Sep 3, 2019
Substrate processing method and substrate processing system
TOKYO ELECTRON LTD7 citations83
US7286890B2Oct 23, 2007
Transfer apparatus for target object
TOKYO ELECTRON LTD13 citations83
US11990323B2May 21, 2024
Focus ring replacement method and plasma processing system
TOKYO ELECTRON LTD2 citations73
US10468278B2Nov 5, 2019
Substrate transfer method and substrate processing apparatus
TOKYO ELECTRON LTD4 citations73
US12567568B2Mar 3, 2026
Focus ring replacement method and plasma processing system
TOKYO ELECTRON LTD0 citations62
US12094696B2Sep 17, 2024
Focus ring replacement method and plasma processing system
TOKYO ELECTRON LTD0 citations62
US7780391B2Aug 24, 2010
Substrate processing device
TOKYO ELECTRON LTD3 citations62
US7532940B2May 12, 2009
Transfer mechanism and semiconductor processing system
TOKYO ELECTRON LTD5 citations62
US11069548B2Jul 20, 2021
Substrate processing method and substrate processing system
TOKYO ELECTRON LTD0 citations61
US6983195B2Jan 3, 2006
Semiconductor processing system and method of transferring workpiece
TOKYO ELECTRON LTD4 citations61
US7371683B2May 13, 2008
Method for carrying object to be processed
TOKYO ELECTRON LTD2 citations53