Inventor

MALLERY DANIEL S

US2 patents

Patents

2 patents

US6746318B2Jun 8, 2004

Workpiece carrier with adjustable pressure zones and barriers

SPEEDFAM IPEC CORP24 citations85

US6558562B2May 6, 2003

Work piece wand and method for processing work pieces using a work piece handling wand

SPEEDFAM IPEC CORP10 citations70